Micro patterning of fused silica by ArF- and F2-laser ablation
نویسندگان
چکیده
منابع مشابه
Molecular dynamics simulation of ultrafast laser ablation of fused silica
Ultrafast laser ablation of fused silica is studied using molecular dynamics simulations. Ionization and generation of free electrons, absorption of the laser energy by free electrons and energy coupling between free electrons and ions are considered. The BKS potential is used to describe molecular interactions and is modified to include the effect of free electrons. Temperature, density, and m...
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Two ultrafast laser pulses at the fundamental Ti:sapphire laser wavelength of 800 nm and the second harmonic at 400 nm were used to study the temporal evolution of the transmissivity in fused silica and resulting material ablation. It was observed that there was a sharp drop in the transmissivity of the probe pulse at zero delay between the two pulses, indicating that there was enhanced absorpt...
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Ultrafast pump-probe experiments were used to study high-intensity ultrafast pulse-ablation dynamics in fused silica. Two laser pulses with varied time delay and pulse energy were used to irradiate fused silica samples and observe the transient reflectivity and transmissivity of the probe pulse. It was seen that the probe reflectivity initially increased due to the formation of free-electron pl...
متن کاملA monolithic micro-tensile tester fabricated by femtosecond laser to inves- tigate fused silica mechanical properties
We present an experimental method to fill in the existing gap of characterization tools for the mechanical testing of fused silica and silica’s polymorphic phases in the microand nanoscales. The approach is based on a monolithic tensile tester, entirely made of fused silica for which the same femtosecond laser in not only used for the fabrication of the device, but also for its operation (loadi...
متن کاملFemtosecond laser micromachining of fused silica molds.
The use of low-energy femtosecond laser beam combined with chemical etching has been proven to be an efficient method to fabricate three-dimensional structures in fused silica. For high-volume application, this technology--like other serial processes--suffers from a moderate production rate. Here, we show that femtosecond laser can also be employed to fabricate silica molds and other patterned ...
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ژورنال
عنوان ژورنال: Journal of Physics: Conference Series
سال: 2007
ISSN: 1742-6588,1742-6596
DOI: 10.1088/1742-6596/59/1/045